FZpolished wafer double polished wafer
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Additional Information
FZ Silicon Polished Wafer • Diameter (mm) : 76.2 - 150 • Dia& tolerance (mm): X±0.3 or According to the customer • Type/ Dopant: N-type (NTD、GD) / P-type(B) • Orientation: <111> / <100> • Resistivity(Ω. cm): 10 - 10000 • Oxygen content (at cm-3 ): ≤1×1016 • Carbon content (at cm-3 ): ≤2×1016 • Thickness& tolerance (um): Based on customer spec. • Surface Condition: Double side polished • Other parameters: According to the SEMI standard or the customer
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