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CZ polished wafer

CZ polished wafer

keywords : Electronic components
Model : -
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Additional Information

CZ Silicon Polished Wafer Diameter (mm):76.2 - 150 • Dia& tolerance (mm):X±0.3 or According to the customer spec. • Type/ Dopant:N-type (P、As、Sb) / P-type(B) • Orientation: <111> / <100> • Resistivity(Ω. cm):0.001 - 60 • RRG(%):N-type ≤ 18% P-type ≤ 10% • Oxygen content (at cm-3 ):≤1×1018 • Carbon content (at cm-3 ):≤5×1016 • Thickness& tolerance (um):Based on customer spec. • Surface Condition:Single side polished • Other parameters:According to the SEMI standard or the customer

CZ Silicon Polished Wafer

Diameter (mm):76.2 - 150

• Dia& tolerance (mm):X±0.3 or According to the customer  spec.

• Type/ Dopant:N-type (P、As、Sb)  / P-type(B)

• Orientation: <111> / <100>

• Resistivity(Ω. cm):0.001 - 60

• RRG(%):N-type ≤ 18%    P-type ≤ 10%

• Oxygen content (at cm-3 ):≤1×1018

• Carbon content (at cm-3 ):≤5×1016

• Thickness& tolerance (um):Based on customer spec.

• Surface Condition:Single side polished

• Other  parameters:According to the SEMI standard or the customer

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