CZ/MCZ grinding sheet
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Additional Information
CZ/MCZ Lapped Slices • Diameter (mm) : 76.2 - 150 • Dia& tolerance (mm): X±0.2 • Type/ Dopant: N-type (P) / P-type(B) • Orientation: <111> / <100> • Resistivity(Ω. cm): 0.001 - 60 • RRG(%): N-type ≤ 18% P-type ≤ 10% • Oxygen content (at cm-3 ): ≤1×1018 • Carbon content (at cm-3 ): ≤5×1016 • Thickness& tolerance (um): Based on customer spec. • Other parameters: According to the SEMI standard or the customer
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